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发明名称
Vorrichtung und Verfahren zur Taktschrägemessung
摘要
申请公布号
DE10297381(T5)
申请公布日期
2004.11.04
申请号
DE20021097381T
申请日期
2002.10.21
申请人
ADVANTEST CORP., TOKIO/TOKYO
发明人
SOMA, MANI;ISHIDA, MASAHIRO;YAMAGUCHI, TAKAHIRO
分类号
G01R23/02;G01R29/02;G01R31/28;G01R31/317;G06F1/10;(IPC1-7):G01R31/28
主分类号
G01R23/02
代理机构
代理人
主权项
地址
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