METHOD FOR THE TARGETED DEFORMATION OF AN OPTICAL ELEMENT

摘要

The invention relates to a method for the targeted deformation of an optical element, in particular a mirror (2a, 2b, 2c, 2d, 2e, 2f) that is positioned in an optical system (1). The optical element (2a, 2b, 2c, 2d, 2e, 2f) or a support element (4), on which the optical element (2a, 2b, 2c, 2d, 2e, 2f) is placed in such a way that forces acting on the support element (4) cause a deformation of the optical element (2a, 2b, 2c, 2d, 2e, 2f) itself, are connected to a fixed structure (6) indirectly by means of fixing elements (5, 5a, 5b, 5c) or connecting members (10). The desired deformation of the optical element (2a, 2b, 2c, 2d, 2e, 2f) is achieved by a targeted variation of the fixing elements (5, 5a, 5b, 5c) to modify the forces exerted in the fixing process on the optical element (2a, 2b, 2c, 2d, 2e, 2f) or the support element (4) and/or the action of the moment of force and/or torque of the connecting members (10) on the fixing elements (5, 5a, 5b, 5c).