| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a criterion (inspection, assurance) and a modification method of a gray tone mask which easily inspect (determine) whether a gray tone part has problems in exposure by a user and a transfer process, when a normal pattern and all modification patterns are determined. <P>SOLUTION: The method for determining defects of the gray tone mask which has a gray tone part as a region, through which the adjusted quantity of a light is transmitted, in which the quantity of the transmitted light is reduced and selectively changing the film thickness of a photoresist, a light-shielding part and a light-transmitting part. The method has (1) a process of creating an image data of the gray tone part, (2) a process of implementing image processing for identifying the defects in the gray tone part, based on the image data, and (3) a process of inspecting the defect, based on the image data after being subjected to image processing. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
