发明名称 |
METHOD AND DEVICE FOR MEASURING CHARGE TRANSFER OF THIN FILM |
摘要 |
PROBLEM TO BE SOLVED: To make a distance between electrodes optionally variable so as to measure the charge mobility or high charge mobility of a very thin film. SOLUTION: A spot near one electrode 42 is irradiated with a laser beam to generate excitons in the thin film 36 as an object of measurement. After a charge isolation process is carried out, only either positive or negative charge is drifted in the direction of plane of the thin film to the other electrode 44, a transient current induced then is measured, and charge mobility is obtained on the basis of the average speed of charge. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2004311541(A) |
申请公布日期 |
2004.11.04 |
申请号 |
JP20030099848 |
申请日期 |
2003.04.03 |
申请人 |
OPUTERU:KK;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
AOKI YASUSHI;YATSUSE KIYOSHI |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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