发明名称 METHOD AND DEVICE FOR MEASURING CHARGE TRANSFER OF THIN FILM
摘要 PROBLEM TO BE SOLVED: To make a distance between electrodes optionally variable so as to measure the charge mobility or high charge mobility of a very thin film. SOLUTION: A spot near one electrode 42 is irradiated with a laser beam to generate excitons in the thin film 36 as an object of measurement. After a charge isolation process is carried out, only either positive or negative charge is drifted in the direction of plane of the thin film to the other electrode 44, a transient current induced then is measured, and charge mobility is obtained on the basis of the average speed of charge. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004311541(A) 申请公布日期 2004.11.04
申请号 JP20030099848 申请日期 2003.04.03
申请人 OPUTERU:KK;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 AOKI YASUSHI;YATSUSE KIYOSHI
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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