THIN FILM MAGNETIC HEAD, ITS MANUFACTURING METHOD, AND FOUNDATION STRUCTURE FOR THIN FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To realize a thin film magnetic head which has excellent a recording characteristic in a high frequency band because of the shortness of magnetic path length and has a small resistance value of a thin film coil. SOLUTION: This thin film magnetic head is provided with a lower magnetic pole layer 10, an upper magnetic pole layer 25, a recording gap layer 24, and the thin film coil 110. The thin film coil 110 is wound spirally around the upper magnetic pole layer 25 while insulated from the lower magnetic pole layer 10 and the upper magnetic pole layer 25. The thin film coil 110 has inner conductor parts 111 to 115, outer conductor parts 121 to 125, and connection parts 131 to 140 for connecting the inner conductor parts 111 to 115 and the outer conductor parts 121 to 125. The inner conductor parts 111 to 115 are arranged between the lower magnetic pole layer 10 and the upper magnetic pole layer 25. The outer conductor parts 121 to 125 are arranged oppositely to the inner conductor parts 111 to 115, sandwiching the upper magnetic pole 25. Only a thin insulation film 15 is interposed between adjacent inner conductor parts. COPYRIGHT: (C)2005,JPO&NCIPI