| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic system capable of easily reproducing the set state of each part even when troublesome adjusting operation is not repeated. SOLUTION: The microscopic system is equipped with a stage 11 on which a sample 10A is placed, observation means 12 to 15, 18, 21, 22, 31, 32, 35, 36, 40 and 47 observing the image of the partial area of the sample, adjusting means 41 to 47 adjusting the observation position and/or the observation condition of the sample by adjusting the stage and/or the observation means, a registering means 40 associating and registering the observation position and the observation condition when an instruction is inputted in compliance with the 1st instruction from the outside, and a control means reading out the observation position and the observation condition related and registered by the registering means in compliance with the 2nd instruction from the outside and controlling the adjusting means in order to reproduce the observed image of the sample based on the observation position and the observation condition. COPYRIGHT: (C)2005,JPO&NCIPI
|
