| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a micro machine having a driving part operated in a larger operational range by a surface micro machining technology. SOLUTION: A recessed part 3a is formed in the surface layer of a substrate 3, and a sacrificial layer 105 filling the recessed part 3a is formed in a pattern. In the state of covering the sacrificial layer 105, an insulating first material film 107 and a conductive second material film 109 having a larger coefficient of thermal expansion are deposited in order. The fist material film 107 and the second material film 109 are subjected to patterning linearly so that each one end is fixed to a substrate 3, and the other end is disposed on the recessed part 3a through the sacrificial layer 105, thereby forming a driving electrode 7. The sacrificial layer 105 is selectively removed for the driving electrode 7 to form a first space part A<SB>1</SB>between the substrate 3 and the driving electrode 7. The first material film 107 and the second material film 109 are heated to bend the driving electrode 7, and the other end of the driving electrode 7 is inserted in the recessed part 3a self-aligningly. COPYRIGHT: (C)2005,JPO&NCIPI
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