| 摘要 |
PROBLEM TO BE SOLVED: To provide a curvature setting device for a polishing tool, accurately measuring the height of a vertex of a dome part of a polishing tool in a simple structure. SOLUTION: A height measuring device 75 is fitted to a slider 16 elevated by a stepping motor 162. The height measuring device 75 is composed of a freely vertically elevated height detection means 88, a detection means 170 and a zero point adjusting mechanism 171. The height detection means 88 is composed of a rod 174 and a contact terminal 175, and the contact terminal 175 is pushed up by expansion of the dome part 25A. The detection means 170 uses a photo sensor composed of a light emitting diode 181a and a photo transistor 181b, detects the rod 174 when the contact terminal 175 is pushed up by the dome part 25A, and transmits the detection signal to a control part. The zero point adjusting mechanism 171 includes an adjusting screw 185, wherein a holding member 178 is moved up and down by the adjusting screw 185, thereby adjusting the height of the height measuring device 75 so that the detection means 170 detects the height detection means 88. COPYRIGHT: (C)2005,JPO&NCIPI
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