| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate bearing device which only requires replacement of an attachment depending on the type of a substrate, without adjustment of complicated suction force, sucks the substrate with vacuum, bears the substrate mounted on a substrate mounting surface so as not to be distorted, and without the deviation of a solder ball mounting location. SOLUTION: The substrate bearing device which bears the substrate mounted on the substrate mounting surface by sucking, is formed by detachably arranging an attachment on which the substrate is directly mounted, on a substrate stage. The attachment has formed therein the substrate mounting surface having a suction port, a gas passage connected to a negative pressure source via the substrate stage, for introducing negative pressure to the suction port, and an outside air introducing port for introducing outside air into the gas passage. Herein the attachment is replaceable depending on the type of the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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