| 摘要 |
An apparatus for forming a pattern has a light source, a scanning unit, a memory, a pulse data selector, a control pulse signal generator, a control pulse signal generator, a writing pulse signal generator, and an optical modulator. The time-interval detector detects successively a time-interval that is a pass-time of the beam in each of a series of fine sections. The pulse data selector selects a set of pulse data, corresponding to the detected time-interval, from a series of sets of pulse data. The control pulse signal generator successively generates a sequence of control pulse signals in accordance with the selected set of pulse data.
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