HIGH-FREQUENCY PIEZOELECTRIC ELEMENT

摘要

The invention relates to radioelectronic engineering, in particular to the piezo-electronic industry producing resonators, generators, filters and similar devices operating at volume acoustic waves in a range of 50-100 MHz. Said invention makes it possible to improve electro-physical parameters of devices operating at volume acoustic waves and to ensure the miniaturisation thereof. The invention is characterised in that the embodiment of a high-quality piezoelement provided with topology in the form of an open-type mesa-structure. The inventive piezoelement is embodied in the form of a shaped monolithic piezoelectric plate provided with a thin vibration area. Said plate is embodied in the form of a polyhedron having T or L-shaped vertical cross section, the active area thereof being bounded by crystallographic planes.