Device for supplying a process chamber with fluid media,申请号US20030647407-传众专利搜索

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发明名称	Device for supplying a process chamber with fluid media
摘要
申请公布号	US2004216666(A1)	申请公布日期	2004.11.04
申请号	US20030647407	申请日期	2003.08.25
申请人	HILBURGER ULRICH;MOLCHANOV ALEXANDER;OSSEGE STEFAN;MILLER MICHAEL;FIREDRICH JOCHEN;WEHRHAN GUNTHER	发明人	HILBURGER ULRICH;MOLCHANOV ALEXANDER;OSSEGE STEFAN;MILLER MICHAEL;FIREDRICH JOCHEN;WEHRHAN GUNTHER
分类号	B01D9/00;B01J3/02;B01J4/00;B01J19/00;B01J19/26;C23C16/00;C30B11/00;C30B29/12;(IPC1-7):C23C16/00	主分类号	B01D9/00
代理机构		代理人
主权项
地址

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