| 摘要 |
PROBLEM TO BE SOLVED: To provide a cold trap capable of shortening time required for regeneration and reducing running costs, and to provide an evacuation device using the cold trap together with a turbo molecular pump. SOLUTION: In the cold trap 10, a heater 13 heating a cold panel 12 placed in a casing 11, a pulse tube refrigerator 14 thermally connected to the cold panel 12, and a temperature sensor 15 measuring the temperature of the cold panel 12 are connected to a controller 17 to control the temperature of the cold panel 12. The turbo molecular pump 20 is arranged downstream of the cold trap 10 in the evacuation device 100. COPYRIGHT: (C)2005,JPO&NCIPI
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