| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of surely suppressing the generation of contaminations, such as metal contaminations. SOLUTION: The heat treatment apparatus is constituted so as to subject a workpiece W to prescribed heat treatment by placing the workpiece atop an installation table 3 erected by means of struts from the bottom of a treatment vessel 4 and with a heating means 38 embedded therein. The apparatus is provided with heat resistant cover members 72, 74 and 76 respectively on the top surface, side faces and under surface of the installation table. As a result, the thermal diffusion of metal atoms etc., which are the cause for the contamination from the installation table can be prevented and accordingly the generation of the various contaminations, such as the metal contaminations and organic contaminations, can be prevented. COPYRIGHT: (C)2005,JPO&NCIPI |
