| 摘要 |
PROBLEM TO BE SOLVED: To precisely position a slave medium, in a magnetic transfer device equipped with a vacuum pump. SOLUTION: The vacuum pump 35 provided to the magnetic transfer device C is installed on a damping means 36, and the propagation of the vibration, associated with the operation of the vacuum pump 35, to a first station S1 that is the close-contact stage for positioning the slave medium to the master carrier, is prevented. COPYRIGHT: (C)2005,JPO&NCIPI
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