Drying apparatus and workpiece processing apparatus having the same

摘要

A drying furnace contains therein hot plates which are disposed in a plurality of stages in a vertical direction, on each of which is seated a platelike workpiece. A gateway for the workpiece is disposed on a front side of the drying furnace and is normally left open to face the plurality of stages of hot plates. A chamber casing is disposed on a rear side of the drying furnace. An exhaust chamber is defined in the chamber casing and has a flow dividing plate which has formed therein a plurality of ventilation holes each facing a gap between the plurality of stages of hot plates. The exhaust chamber is forcibly exhausted by an exhaust blower.