AUSRICHTUNGSGERÄT MIT DREI IM WINKEL VON JEWEILS 120 GRAD ZUEINANDER STEHENDEN SPULEN, SOWIE HIERMIT AUSGERÜSTETES LITHOGRAPHISCHES GERÄT

摘要

The positioning device (3) has a first part displaceable relative to a second part having an object table (5). The second part is displaceable relative to the first part about X,Y and Z axes by three motors (75,77,79) each having an electrical coil system (81,83,85) cooperating with a permanent magnet system. The main axis of each of the motors encloses an angle of 120 degrees with the main axis of each of the other two motors. In this manner the points of application on the second part of the driving forces of the motors are uniformly distributed relative to the second part, so that driving forces can be uniformly transmitted to the object table by a simple, light stiffening structure of the second part.