HOLDER FOR SEMICONDUCTOR OR LIQUID CRYSTAL MANUFACTURING SYSTEM AND SEMICONDUCTOR OR LIQUID CRYSTAL MANUFACTURING SYSTEM MOUNTING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a holder for a semiconductor or liquid crystal manufacturing system in which soaking properties are enhanced on the article holding surface, and to provide a semiconductor or liquid crystal manufacturing system mounting it. SOLUTION: Soaking properties can be enhanced on the holding surface of a metal plate having an article holding surface by forming a conductive layer on an insulation layer formed on the side opposite to the holding surface. The conductive layer is preferably a heater circuit. Furthermore, durability can be enhanced by setting the difference of thermal expansion coefficient between the metal plate and the insulation layer not larger than 4.0×10-6/°C. When such a holder is mounted on a semiconductor production system or a liquid crystal production system, a semiconductor or liquid crystal production system exhibiting high productivity and yield can be provided. COPYRIGHT: (C)2005,JPO&NCIPI