| 摘要 |
PROBLEM TO BE SOLVED: To provide a gate valve of a vacuum processing device that holds difference of degree of vacuum between the vacuum chambers, and can prevent outflow of gas in the vacuum processing device that has the gate valve disposed between two vacuum chambers for transferring a processed object in vacuum to another chamber. SOLUTION: The vacuum processing device comprises two flanges 3-1 and 3-2 having, between two vacuum chambers 2-1 and 2-2, an opening for passing the band-like processed object 10 in carrying in or out it, the gate valve 6-1 for blocking fluid by grasping the band-like processed object, and a valve chamber constituting a passage of the band-like processed object. One of two flanges having the opening for passing the processed object has the gate valve formed of a movable flexible flange 3-1. A small-diameter opening 7 and the valve 6-2 are disposed inside the gate valve 6-1. When the gate valve 6-1 opens, a valve 6-2 of the small-diameter opening opens in cooperation with it. When the gate valve 6-1 does not open due to pressure difference, the valve 6-2 of the small-diameter opening opens. When the valve 6-2 of the small-diameter opening does not open due to pressure difference, the gate valve 6-1 opens. COPYRIGHT: (C)2005,JPO&NCIPI
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