发明名称 |
HIGH-DENSITY PLASMA SOURCE USING EXCITED ATOMS |
摘要 |
The present invention relates to a plasma source. The plasma source includes a cathode assembly. An anode is positioned adjacent to the cathode assembly. An excited atom source generates an initial plasma and excited atoms from a volume of feed gas. The initial plasma and excited atoms are located proximate to the cathode assembly. A power supply generates an electric field between the cathode assembly and the anode. The electric field super-ionizes the initial plasma so as to generate a high-density plasma. |
申请公布号 |
WO2004095498(A2) |
申请公布日期 |
2004.11.04 |
申请号 |
WO2004US10968 |
申请日期 |
2004.04.08 |
申请人 |
ZOND,INC;CHISTYAKOV, ROMAN |
发明人 |
CHISTYAKOV, ROMAN |
分类号 |
C23C14/34;C23C14/35;H01J37/00;H01J37/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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