Mikromechanischer Beschleunigungssensor

摘要

The acceleration sensor involves bending springs (2-5) which hold the seismic mass (1) in a rest position, of which two opposite pairs e.g. (2,3) are arranged in a flat angle. The seismic mass is deflected from the rest position, by a reacting acceleration. An excitation is provided by exciting at least one spring into a resonant vibration. An evaluation system (21) is provided for evaluating the flexural vibration frequency of the spring. The springs are aligned at a flat angle to each other. The evaluation system determines the direction and the value of the reacting acceleration from the alteration of the resonant flexural vibration frequency of one of the springs, by using comb structures connected to it (26,27) which engage with actuators (7,8) connected to an oscillator (6).