发明名称 DUPLICATE TRANSPARENT HORIZONTAL REACTION TUBE DEVICE FOR LOW PRESSURE HEAT PLASMA APPARATUS
摘要 PURPOSE: Provided is a duplicate transparent horizontal reaction tube device for a low pressure heat plasma apparatus, which permits a user to observe the overall state of plasma, is easily detachable for washing, and has improved safety and various lengths. CONSTITUTION: The duplicate transparent horizontal reaction tube(4) is disposed between a plasma gun(2) and a fractionation chamber in a low pressure heat plasma apparatus. The reaction tube comprises a quartz tube(12) having an inner path through which plasma jet is ejected from the plasma gun(2), and a transparent plastic cooling tube(14) disposed to surround the exterior of the quartz tube(12) and forming a cooling path(13) through which cooling water flows at the outside of the quartz tube(12). Both ends of the quartz tube(12) and the cooling tube(14) are tightly coupled to a first body(62) and a second body(68) having an inlet(56) and outlet(58) for cooling water, respectively, by a quartz tube protection ring(52,54,152,154) and a cooling tube protection ring(36,38,136,138).
申请公布号 KR20040092676(A) 申请公布日期 2004.11.04
申请号 KR20030026200 申请日期 2003.04.25
申请人 KO RYO VACUUM CO., LTD. 发明人 CHOI, BONG GEUN;HWANG, IN GI;JU, GYEONG;KIM, GYEONG HUN;KIM, YEONG TAEK;SIM, GWANG BO;SIM, SEUNG HWAN
分类号 B82B3/00;(IPC1-7):B82B3/00 主分类号 B82B3/00
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