摘要 |
PURPOSE: Provided is a duplicate transparent horizontal reaction tube device for a low pressure heat plasma apparatus, which permits a user to observe the overall state of plasma, is easily detachable for washing, and has improved safety and various lengths. CONSTITUTION: The duplicate transparent horizontal reaction tube(4) is disposed between a plasma gun(2) and a fractionation chamber in a low pressure heat plasma apparatus. The reaction tube comprises a quartz tube(12) having an inner path through which plasma jet is ejected from the plasma gun(2), and a transparent plastic cooling tube(14) disposed to surround the exterior of the quartz tube(12) and forming a cooling path(13) through which cooling water flows at the outside of the quartz tube(12). Both ends of the quartz tube(12) and the cooling tube(14) are tightly coupled to a first body(62) and a second body(68) having an inlet(56) and outlet(58) for cooling water, respectively, by a quartz tube protection ring(52,54,152,154) and a cooling tube protection ring(36,38,136,138).
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申请人 |
KO RYO VACUUM CO., LTD. |
发明人 |
CHOI, BONG GEUN;HWANG, IN GI;JU, GYEONG;KIM, GYEONG HUN;KIM, YEONG TAEK;SIM, GWANG BO;SIM, SEUNG HWAN |