ION-IMPLANTATION EQUIPMENT FOR IMPROVING INNER STRUCTURE OF POWER SUPPLY

摘要

PURPOSE: Ion-implantation equipment is provided to check periodically a resistor for restraining secondary electrons by improving an inner structure of a power supply. CONSTITUTION: Ion-implantation equipment includes a power supply and a tester. The power supply include a resistor(40), electric wires(42) connected with both terminals of the resistor, and a pair of connectors(44) exposed to the outside. The connectors are connected with the electric wires, respectively. At this time, a voltage is applied from the power supply through the resistor in order to restrain secondary electrons from being generated at an analyzing part, an accelerating part, or a scan part. The tester(50) is used for measuring periodically the magnitude of the resistor through the connectors.