SUBSTRATE DRYING APPARATUS INCLUDING NOZZLE INFLOW LINE AND DISPENSER LINE

摘要

PURPOSE: A substrate drying apparatus is provided to allow a nozzle to spray air to a distance demanded with a little air quantity. CONSTITUTION: A substrate drying apparatus comprises a transfer part for transferring a plate, and a nozzle part for spraying a gas on the plate. The nozzle part comprises an inflow line(362) supplied with the gas, a dispenser line(390) spraying the gas, and a guide(370) mounted at a lower part forming the dispenser line and protruded with a sprayed direction of the gas by comparing with an upper part forming the dispenser line.