SEMICONDUCTOR EQUIPMENT WITH DYNAMIC WAFER CHUCK TO PREVENT ROTARY SHAFT OF MOTOR FROM SLIDING

摘要

PURPOSE: Semiconductor equipment with a dynamic wafer chuck is provided to prevent a rotary shaft of a motor from sliding by forming a hole with a flat portion at the center of a pulley corresponding to the shape of the shaft. CONSTITUTION: A wafer is loaded on a wafer chuck. A support part is connected to a side or a bottom of the wafer chuck. A pulley with a center hole(119) is spaced apart from the support part. The center hole has a flat portion. A driving motor with a rotary shaft(112) is connected with the pulley through the center hole. At this time, the cross-sectional shape of the rotary shaft is the same as that of the center hole. A belt is used for connecting the pulley with the support part.