Composition for removing residues from the microstructure of an object,申请号EP20040011792-传众专利搜索

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发明名称	Composition for removing residues from the microstructure of an object
摘要
申请公布号	EP1457550(A3)	申请公布日期	2004.11.03
申请号	EP20040011792	申请日期	2002.02.08
申请人	AIR PRODUCTS AND CHEMICALS, INC.	发明人	PETERS, DARRYL W.;EGBE, MATTHEW I.
分类号	B08B3/08;B08B3/10;B08B7/00;C11D7/00;C11D7/08;C11D7/26;C11D7/32;C11D7/60;C11D11/00;C11D17/00;F26B5/04;G03F7/42;H01L21/00;H01L21/304;H01L21/306;H01L21/311;(IPC1-7):C11D3/37;C11D1/00;B08B3/00	主分类号	B08B3/08
代理机构		代理人
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