PIEZOELECTRIC ACCELERATION SENSOR

摘要

A piezoelectric acceleration sensor comprising an acceleration detecting unit having a weight fixed to one surface of a diaphragm and a piezoelectric element fixed to another surface thereof by bonding a reverse surface of the piezoelectric element thereto, and surface electrodes and reverse electrodes being respectively formed on respective surfaces of the piezoelectric element, wherein a supporting pattern for maintaining a distance between the diaphragm and the surface electrodes uniformly is formed on the reverse surface of the piezoelectric element so as to suppress unevenness in bonding at the time of a connection of the piezoelectric element and the diaphragm, and eliminate a variation of detection sensitivity of each axis.