发明名称 |
Fabrication method of semiconductor device |
摘要 |
The present invention comprises the steps of forming a connection hole in an interlayer insulating film including an organic insulating film; forming an inorganic film covering on an upper surface of the interlayer insulating film and an inner surface of the connection hole; forming an organic film for filling inside the connection hole on an inorganic film; removing the organic film inside the connection hole so as to leave a part of the organic film at a bottom of the connection hole; forming a wiring trench connecting to the connection hole in the interlayer insulating film; removing the organic film inside the connection hole; removing the inorganic film; and forming a trench wiring by filling a conductive material in the wiring trench and inside the connection hole and forming a plug continuing from the trench wiring.
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申请公布号 |
US6812133(B2) |
申请公布日期 |
2004.11.02 |
申请号 |
US20030653986 |
申请日期 |
2003.09.04 |
申请人 |
SONY CORPORATION |
发明人 |
TAKEUCHI KOICHI |
分类号 |
H01L21/28;H01L21/768;H01L23/522;(IPC1-7):H01L21/476;H01L21/44 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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