| 发明名称 |
Micromachined component and method of manufacture |
| 摘要 |
A method of manufacturing a micromachined component includes using a first liquid to etch a first layer (140) located underneath a second layer (150), exposing the second layer to a second liquid that is inorganic and miscible in carbon dioxide, and supercritical drying the micromachined component with carbon dioxide.
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| 申请公布号 |
US6811714(B1) |
申请公布日期 |
2004.11.02 |
| 申请号 |
US20000680777 |
申请日期 |
2000.10.06 |
| 申请人 |
FREESCALE SEMICONDUCTOR, INC. |
发明人 |
GORRELL JONATHAN F.;NIELSEN GORDANA S. |
| 分类号 |
B81B3/00;B81C1/00;(IPC1-7):C23F1/00 |
主分类号 |
B81B3/00 |
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