发明名称 |
Optical sensor for use in high vacuums |
摘要 |
An optical sensor for use in high vacuum plants and/or in ultrahigh vacuum plants has a metal housing surrounding an interior space in a manner substantially impermeable to gas in which a window which transmits light to be detected is provided and an optical sensor element arranged in the interior space for the detection of light to be detected which is incident through the window.
|
申请公布号 |
US6812451(B2) |
申请公布日期 |
2004.11.02 |
申请号 |
US20020133204 |
申请日期 |
2002.04.26 |
申请人 |
SICK AG |
发明人 |
BLUEMCKE THOMAS;HOERSCH INGOLF |
分类号 |
G01J1/02;G01V8/10;(IPC1-7):G06M7/00 |
主分类号 |
G01J1/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|