发明名称 |
Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films |
摘要 |
Methods for roll-to-roll deposition of optically transparent and high conductivity metallic thin films are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film; and (3) collecting the composite film in continuous rolls. Typically, the thin conductive metallic film is an InCeO-Ag-InCeO film. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising InCeO-Ag-InCeO film formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 90% throughout the visible region; an electrical resistance of no greater than about 10 Omega/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the InCeO/Ag/InCeO metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
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申请公布号 |
US6811815(B2) |
申请公布日期 |
2004.11.02 |
申请号 |
US20020172282 |
申请日期 |
2002.06.14 |
申请人 |
AVERY DENNISON CORPORATION |
发明人 |
HE XIAO-MING;HEYDARPOUR RAMIN |
分类号 |
G02F1/1343;H01B1/02;H01B1/08;(IPC1-7):C23C16/00 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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