发明名称 Interferometer system
摘要 An interferometric measurement system capable of measuring tilt of a reflecting surface with respect to a vertical axis. The system preferably includes four laser beams spaced at predetermined distances to measure distances between the measurement system and four locations on the reflecting surface. A controller is also provided for receiving inputs from the measuring laser beams to mathematically determine a tilt of the location being measured.
申请公布号 US6813022(B2) 申请公布日期 2004.11.02
申请号 US20010934081 申请日期 2001.08.22
申请人 NIKON CORPORATION 发明人 INOUE FUYUHIKO
分类号 G01B11/00;G03F7/20;(IPC1-7):G01C1/00;G01B11/26 主分类号 G01B11/00
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