| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic drive device used for a bond head which is free from any deformation of the bearing of the bond head or undersirable vibration of the bond head. SOLUTION: In an electromagnetic drive device which has a degree of freedom in the horizontal direction and is provided with a stator 2 and a coil 3, the coil 3 is arranged so that a force F applied by the stator 2 on the coil 3 is constantly directed towards a point P as close as possible to the center of gravity 5 of a working device 1 moved by the drive device, or is directed from the point P. Thus, the direction of the force F is determined by the position of the coil 3 with respect to the stator 2. The coil 3 is preferably provided with a single winding 6 coiled along an arc concentric around a point coinciding with the center of gravity of the working device 1. The drive device is used to drive, for example, a bond head of a wire bonder. |
