摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrooptical deivce capable of precisely flattening an inter-layer insulating film (a flattened insulating film) for forming an excellent organic EL element, and provide an electrooptical device, as well as an electronic apparatus. SOLUTION: The manufacturing method of the electrooptical device having a flattened insulating film 284 between a substrate 20 and a light-emitting layer 60 comprises a process of laminating and forming a plurality of flattened insulating films. COPYRIGHT: (C)2005,JPO&NCIPI
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