ANTIREFLECTION FILM, OPTICAL MEMBER, OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS, AND MANUFACTURING METHOD FOR ANTIREFLECTION FILM

摘要

PROBLEM TO BE SOLVED: To provide an antireflection film which has easily improved angle characteristics for short-wavelength light, simultaneously, enables the number of laminated layers to be suppressed.

SOLUTION: A plurality of layers are laminated, and the refractive index of the 1st layer coming in contact with an incident medium is ≤1.3 and the film is formed into a 2-layer to 6-layer structure.

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