| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a light beam scanner in which a problem caused by scanning using two reflection mirrors is solved and a high speed and accurate scanning with a light beam is performed. <P>SOLUTION: A reflecting mirror 104 is supported with a journal part 10 freely turnably around an X-axis and a Y-axis turning shafts, respectively, the reflecting mirror 104 is turned with a driving part 20 electromagnetically around the X-axis and the Y-axis turning shafts, respectively, thus a two-dimensional scanning is performed with the single reflecting mirror 104. Further, the journal part 10 has a structure of static pressure air bearing which does not cause mechanical friction. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
