SOLID STATE IMAGE PICKUP DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a solid state image pickup device in which noise is reduced and sensitivity is improved. SOLUTION: The solid state image pickup device is provided with a plurality of photosensitive cells and a driving means for driving the photosensitive cells. Each photosensitive cell comprises a photodiode 5 formed on the surface of a semiconductor substrate 9 so as to be exposed in order to accumulate signal charge obtained by photoelectrically converting incident light, a transfer transistor 6 for transferring the signal charge accumulated by the photodiode 5, a suspended diffusion layer 1 for temporarily accumulating the signal charge transferred by the transfer transistor 6, and an amplification transistor 2 for amplifying the signal charge temporarily accumulated in the suspended diffusion layer 1. Source/drain diffusion layers 3 formed in the amplification transistor 2 are covered with salicide layers 4 and the suspended diffusion layer 1 is formed on the surface of the semiconductor substrate 9 so as to be exposed. COPYRIGHT: (C)2005,JPO&NCIPI