| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive small-sized vibration detection device capable of detecting highly accurately vibration of a rotating part of a rotation driving mechanism. SOLUTION: A rotating shaft 1 is journaled rotatably by a bearing body 2 in the state where the outer circumferential face 11 of the rotating shaft 1 is rust-jointed to the inner circumferential face 21 of the bearing body 2. A lubricating oil 8 is filled on the rust joint face between the outer circumferential face 11 of the rotating shaft 1 and the inner circumferential face 21 of the bearing body 2. A recessed part 22 is formed on the inner circumferential face 21 of the bearing body 2, and this vibration detection device 3 is disposed in the recessed part 22. The vibration detection device 3 is equipped with a sensor chip 31 disposed in the recessed part 22, a soft material 32 wherein a flow detection passage is formed, for sending a part of the lubricating oil 8 flowing in the rotation direction of the rotating shaft 1 from the upstream side of the sensor chip 31 to the downstream side of the sensor chip 31 via the sensor chip 31, and an operation part 10 for inputting the flow rate of the lubricating oil 8 detected by the sensor chip 31 and operating vibration of the rotating shaft 1 from the flow rate. COPYRIGHT: (C)2005,JPO&NCIPI
|
