PIEZOELECTRIC DEVICE AND GYRO SENSOR, METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATION REED AND PIEZOELECTRIC DEVICE, MOBILE PHONE USING PIEZOELECTRIC DEVICE, AND ELECTRONIC EQUIPMENT USING PIEZOELECTRIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrating reed and a piezoelectric device which can manufacture the piezoelectric vibration reed having oscillating arms with grooves with satisfactory dimensional accuracy, to provide the piezoelectric device to be formed by the method, and to provide a gyro sensor, a mobile phone and electronic equipment using the piezoelectric device.

SOLUTION: The piezoelectric device is provided with a base 51 and a plurality of oscillating arms 34, 35 to extend in parallel from the base and stores the piezoelectric vibrating reed having grooves 56, 57 to extend in the length direction in each oscillating arm, the piezoelectric vibrating reed is provided with variant profile 74 to be projected at least in the oscillating arms in one of their width directions and a projected part 73 which projects in the opposite direction of one of the oscillating arms and is chamfered.

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