| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spin coater for ensuring to close the top of an outer cup with an outer cup lid with the upper surface of an inner cup closed by an inner cup lid, by allowing the outer cup lid always to be free in up and down direction. <P>SOLUTION: The spin coater in which an inner cup that can be rotated by a motor is disposed in an outer cup supported by a base and a carrying table that holds a substrate and rotates integrally with the inner cup is disposed in the inner cup so that the coating liquid dropped on the substrate surface can be diffused by a centrifugal force associated with the rotation of the substrate, is provided with a rod guide fixed to the periphery of a cylinder box to compose a support in the outer cup lid, wherein the outer cup lid is allowed always to be free in the up and down direction. An uneven portion is formed between the bottom of the outer cup and the lower surface of the inner cup by gradually raising the bottom of the outer cup to the outer radial direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
