| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of wires on a probe frame in a substrate inspection device. SOLUTION: This substrate inspection device is used for inspecting a panel 2a on a substrate by impressing an inspection signal on an electrode 2c formed on the substrate 2. This device is equipped, on the same probe frame 1a, with a probe 1b electrically connected to the electrode 2c to impress the inspection signal on the electrode and at least one signal forming circuit 1c for forming the inspection signal sent to the probe 1b. The probe frame 1a is mounted with the circuits (signal forming circuits) for forming the inspection signal. This makes it possible to reduce the number of wires on the probe frame 1a. COPYRIGHT: (C)2005,JPO&NCIPI |
