发明名称 METHOD AND APPARATUS FOR MANUFACTURING INFORMATION RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide an information recording medium for forming a magnetic film, where uniformity in film thickness, permeability, a composition, or the like is high, in the flow direction of the film with satisfactory productivity. SOLUTION: A method for manufacturing the information recording medium comprises a process for forming at least one layer of magnetic film 12 on a light-transmission base material 1 traveling continuously; a process for irradiating the magnetic film with X rays generated by an X-ray generator 40, detecting fluorescent X rays secondarily generated from the magnetic film or reflection X rays by a detector 41, and continuously measuring the film thickness; a process for detecting the permeability of the magnetic film by a magnetism measuring instrument for continuously measuring the permeability of the magnetic film; and a process for calculating the difference between a measurement result and a target value so that the measured film thickness and the measured result of the permeability become the target value by adjusting at least one of the traveling speed of the base material, applied power, the flow rate of a feed gas, and film formation pressure as the manufacturing condition of the information recording medium. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004303292(A) 申请公布日期 2004.10.28
申请号 JP20030091665 申请日期 2003.03.28
申请人 DAINIPPON PRINTING CO LTD 发明人 SAKAKURA OSAMU
分类号 C23C14/54;G11B5/84;G11B5/851;G11B11/105;(IPC1-7):G11B5/851 主分类号 C23C14/54
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