MEMS device having time-varying control

摘要

Devices and methods for controlling a MEMS actuator are disclosed. The device includes a pair of parallel plates having a gap therebetween. The size of the gap is responsive to a voltage differential between the pair of plates. The device also includes a controller adapted to apply a voltage profile to at least one of the pair of plates to maintain a desired gap size. The voltage profile has a time-varying voltage.