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发明名称
Vorrichtung zur Probenuntersuchung mittels eines atmosphärischen oder druckvariablen Rasterelektronenmikroskops
摘要
申请公布号
DE10256718(B4)
申请公布日期
2004.10.28
申请号
DE20021056718
申请日期
2002.12.04
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
HEILMANN, ANDREAS;FUETING, MANFRED;SCHWANECKE, MICHAEL
分类号
H01J37/20;H01J37/252;(IPC1-7):H01J37/20
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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