| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method that has the capability (1) to avoid environmental pollution due to developer, etchant or the like, (2) to suppress deterioration of transmittance of a light transmitting member caused by bubbles and bright points without repeating emission of a laser beam, (3) to flexibly deal with an on-demand type production demand, and (4) to suppress the cost increase of laser beam machining equipment incidental to reinforcement of the moving mechanism of a machining table. <P>SOLUTION: A transparent substrate 100 is temporarily stuck onto a workpiece holding jig 200 on which a laser reflection layer 203 is fixed on the base body 201 with a sticking layer 201. The substrate and the jig are then integrally sucked to the glass plate 5a of the machining table of the laser beam machining device. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
