| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater, preventing a short circuit of a resistance heater, while functioning excellently for heating a silicon wafer. SOLUTION: The ceramic heater has an insulating layer on at least part of the surface of a ceramic substrate, having a volume resistivity higher than the ceramic substrate, and the resistance heater is formed on the insulation layer. COPYRIGHT: (C)2005,JPO&NCIPI |
