| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric capacitor protected by a thin protective film sufficiently functioning as a hydrogen degradation resistant protective film, and its manufacturing method. SOLUTION: The dielectric capacitor is constituted of a pair of electrodes and a dielectric positioned between them and is provided with the protective film formed of an oxide containing a metal and silicon. The capacitor is manufactured by a method in which a dielectric capacitor structure constituted of a pair of electrodes and the dielectric positioned between them is formed, the solution of the protective film material of the oxide containing the metal and the silicon is applied to it, heat treatment is executed and the protective film is formed. COPYRIGHT: (C)2005,JPO&NCIPI
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