| 摘要 |
PROBLEM TO BE SOLVED: To form a layer which enhances adhesiveness between an electro-optical layer as an organic matter and an electrode as an inorganic matter without depending on vapor deposition so as to correspond easily to a large substrate, regarding a manufacturing method of an electro-optical device such as an organic EL display device or the like. SOLUTION: As for the manufacturing method of the electro-optical device 1 composed by laminating a first electrode 23, the electro-optical layer 60, and a second electrode 50 on a substrate 20, after the electro-optical layer 60 as an organic matter is formed on the first electrode 23, the surface of this electro-optical layer 60 is reformed by a nitrogen plasma treatment, and the second electrode 50 as an inorganic matter is formed on this reformed film 30. COPYRIGHT: (C)2005,JPO&NCIPI
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