| 摘要 |
PROBLEM TO BE SOLVED: To prevent degradation of degree of vacuum in a vacuum chamber attributable to a carrier when the work carrier is utilized in a process utilizing the vacuum chamber. SOLUTION: In a carrier, a space between a stator 41 and a rotor 42 of a servo motor to drive each arm of a carrying unit is demarcated into a first closed space with the rotor, an arm part or the like belonging thereto and a second closed space with the stator or the like belonging thereto by a bulkhead 90 formed of a thin metal film. The second closed space is further demarcated into a fourth closed space forming an exterior wall side of the carrier and a third closed space with the stator belonging thereto by a bulkhead 91 thicker than the bulkhead 90. The fourth closed space is maintained in a state evacuated below the atmospheric pressure, and then, the third closed space and the first closed space are gradually evacuated in this order. The carrying chamber of the carrier 1 can be maintained at high vacuum without breaking the bulkhead 90, and the inside of the vacuum chamber can be maintained at high vacuum. COPYRIGHT: (C)2005,JPO&NCIPI
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