| 摘要 |
PROBLEM TO BE SOLVED: To avoid any action failure of an inner member even if a temperature of a fluid to be controlled is increased and concurrently to perform a superior control over the fluid. SOLUTION: This fluid processing device (a flow path changing-over valve) is constructed such that a valve rotor 24 is arranged inside a valve housing 23 in such a way that it can be rotated in respect to the valve housing, a flowing state of filled item is controlled, the valve rotor is in contact with the filled item and the valve housing is arranged while being in contact with a surrounding atmosphere. The valve rotor is constituted by material quality having a lower linear expansion coefficient than that of the valve housing. For example, the valve housing 23 is constituted by austenite type stainless steel, the valve rotor 24 is constituted by martensite type stainless steel, ferrite type stainless steel or precipitation hardening type stainless steel. COPYRIGHT: (C)2005,JPO&NCIPI
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